Inventor
CHAPIN MICHAEL
US4 patents
⚠️ This page may combine multiple inventors who share the name “CHAPIN MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS6537733B2Mar 25, 2003
Method of depositing low dielectric constant silicon carbide layers
APPLIED MATERIALS INC292 citations98
US7200460B2Apr 3, 2007
Method of depositing low dielectric constant silicon carbide layers
APPLIED MATERIALS INC17 citations92
US6855484B2Feb 15, 2005
Method of depositing low dielectric constant silicon carbide layers
APPLIED MATERIALS INC10 citations73