Inventor
CUI ZHENJIANG “DAVID”
US2 patents
Patents
2 patentsUS7879683B2Feb 1, 2011
Methods and apparatus of creating airgap in dielectric layers for the reduction of RC delay
APPLIED MATERIALS INC35 citations91
US7189658B2Mar 13, 2007
Strengthening the interface between dielectric layers and barrier layers with an oxide layer of varying composition profile
APPLIED MATERIALS INC11 citations82