Inventor
SHEK MEIYEE MAGGIE LE
US3 patents
Patents
3 patentsUS6656840B2Dec 2, 2003
Method for forming silicon containing layers on a substrate
APPLIED MATERIALS INC54 citations93
US7879683B2Feb 1, 2011
Methods and apparatus of creating airgap in dielectric layers for the reduction of RC delay
APPLIED MATERIALS INC35 citations91
US7851385B2Dec 14, 2010
Low temperature conformal oxide formation and applications
APPLIED MATERIALS INC0 citations46