Inventor
MORI ICHIRO
US31 patents
⚠️ This page may combine multiple inventors who share the name “MORI ICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
12 patentsUS7120882B2Oct 10, 2006
Method of setting process parameter and method of setting process parameter and/or design rule
TOSHIBA KK225 citations99
US5429730AJul 4, 1995
Method of repairing defect of structure
TOSHIBA KK114 citations97
US6376139B1Apr 23, 2002
Control method for exposure apparatus and control method for semiconductor manufacturing apparatus
TOSHIBA KK70 citations96
US5639699AJun 17, 1997
Focused ion beam deposition using TMCTS
TOSHIBA KK62 citations96
US5422205AJun 6, 1995
Micropattern forming method
TOSHIBA KK91 citations96
US7181707B2Feb 20, 2007
Method of setting process parameter and method of setting process parameter and/or design rule
TOSHIBA KK28 citations93
US6226074B1May 1, 2001
Exposure monitor mask, exposure adjusting method and method of manufacturing semiconductor devices
TOSHIBA KK41 citations93
US6991878B2Jan 31, 2006
Photomask repair method and apparatus
TOSHIBA KK23 citations92
US6340542B1Jan 22, 2002
Method of manufacturing a semiconductor device, method of manufacturing a photomask, and a master mask
TOSHIBA KK36 citations92
US5523576AJun 4, 1996
Charged beam drawing apparatus
TOSHIBA KK21 citations87
US4469949ASep 4, 1984
Electron beam pattern transfer device and method for aligning mask and semiconductor wafer
TOSHIBA KK21 citations82
US7100146B2Aug 29, 2006
Design system of alignment marks for semiconductor manufacture
TOSHIBA KK2 citations62
TOKYO SHIBAURA ELECTRIC CO
4 patentsUS4480284AOct 30, 1984
Electrostatic chuck plate
TOKYO SHIBAURA ELECTRIC CO470 citations98
US4572956AFeb 25, 1986
Electron beam pattern transfer system having an autofocusing mechanism
TOKYO SHIBAURA ELECTRIC CO21 citations81
US4467210AAug 21, 1984
Electron-beam image transfer device
TOKYO SHIBAURA ELECTRIC CO9 citations74
US4560278ADec 24, 1985
Fixed-slit type photoelectric microscope
TOKYO SHIBAURA ELECTRIC CO4 citations62
SONY CORP
3 patentsUS10185209B2Jan 22, 2019
Image projection apparatus and illumination optical system
SONY CORP0 citations52
US9880452B2Jan 30, 2018
Image projection apparatus and illumination optical system
SONY CORP0 citations52
US9470884B2Oct 18, 2016
Image projection apparatus and illumination optical system
SONY CORP0 citations52