Inventor
CALIENDO STEVE
US2 patents
Patents
2 patentsUS7550748B2Jun 23, 2009
Apparatus and methods for systematic non-uniformity correction using a gas cluster ion beam
TEL EPION INC8 citations78
US7550749B2Jun 23, 2009
Methods and processing systems for using a gas cluster ion beam to offset systematic non-uniformities in workpieces processed in a process tool
TEL EPION INC19 citations78