Inventor
KAMEYAMA MASAOMI
JP17 patents
⚠️ This page may combine multiple inventors who share the name “KAMEYAMA MASAOMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
13 patentsUS6249335B1Jun 19, 2001
Photo-mask and method of exposing and projection-exposing apparatus
NIKON CORP98 citations98
US7471371B2Dec 30, 2008
Exposure apparatus and device fabrication method
NIKON CORP53 citations96
US5739898AApr 14, 1998
Exposure method and apparatus
NIKON CORP150 citations96
US5703675ADec 30, 1997
Projection-exposing apparatus with deflecting grating member
NIKON CORP61 citations96
US4931830AJun 5, 1990
Projection exposure apparatus
NIKON CORP108 citations96
US8018570B2Sep 13, 2011
Exposure apparatus and device fabrication method
NIKON CORP17 citations92
US5311362AMay 10, 1994
Projection exposure apparatus
NIKON CORP28 citations92
US7916272B2Mar 29, 2011
Exposure apparatus and device fabrication method
NIKON CORP4 citations73
US5576801ANov 19, 1996
Projection exposure apparatus
NIKON CORP12 citations73
US5530518AJun 25, 1996
Projection exposure apparatus
NIKON CORP15 citations73
US7700459B2Apr 20, 2010
Method for producing electronic device and electronic device
NIKON CORP4 citations62
US8804095B2Aug 12, 2014
Exposure apparatus and device fabrication method
NIKON CORP0 citations52
US7432993B2Oct 7, 2008
Display device manufacturing method and display device
NIKON CORP1 citations52