Inventor
VAN DEN AKKER THEODORUS LEONAR
NL2 patents
Patents
2 patentsUS7016016B2Mar 21, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations59
US7209216B2Apr 24, 2007
Lithographic apparatus and device manufacturing method utilizing dynamic correction for magnification and position in maskless lithography
ASML NETHERLANDS BV4 citations58