P

Inventor

VASCHENKO GEORGIY

US5 patents
⚠️ This page may combine multiple inventors who share the name “VASCHENKO GEORGIY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents
US9699876B2Jul 4, 2017

Method of and apparatus for supply and recovery of target material

ASML NETHERLANDS BV3 citations62
US11317501B2Apr 26, 2022

Method of purifying target material for an EUV light source

ASML NETHERLANDS BV0 citations55
US10455680B2Oct 22, 2019

Method and apparatus for purifying target material for EUV light source

ASML NETHERLANDS BV0 citations45

CYMER INC

1 patent
US7897947B2Mar 1, 2011

Laser produced plasma EUV light source having a droplet stream produced using a modulated disturbance wave

CYMER INC33 citations88

UNIV COLORADO STATE RES FOUND

1 patent
US7931850B2Apr 26, 2011

Nanometer-scale ablation using focused, coherent extreme ultraviolet/soft x-ray light

UNIV COLORADO STATE RES FOUND2 citations58