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Inventor
GELATOS AVERGINOS V
US
2 patents
⚠️ This page may combine multiple inventors who share the name “GELATOS AVERGINOS V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
1 patent
US7405158B2
Jul 29, 2008
Methods for depositing tungsten layers employing atomic layer deposition techniques
APPLIED MATERIALS INC
105 citations
96
WU KAI
1 patent
US8071478B2
Dec 6, 2011
Method of depositing tungsten film with reduced resistivity and improved surface morphology
WU KAI
39 citations
90