Inventor
PFISTERER MIKE
DE3 patents
Patents
3 patentsUS11702740B2Jul 18, 2023
Closure element for closing a loading opening of an inner housing of a CVD reactor
AIXTRON SE4 citations68
US11959190B2Apr 16, 2024
Device for connecting a susceptor to a drive shaft
AIXTRON SE0 citations51
US10883171B2Jan 5, 2021
CVD reactor and method for cleaning a CVD reactor
AIXTRON SE0 citations44