Inventor

YANG DOMINIC CHANGWON

US3 patents

Patents

3 patents

US5667938ASep 16, 1997

Acid scavengers for use in chemically amplified photoresists

IBM15 citations80

US5733705AMar 31, 1998

Acid Scavengers for use in chemically amplified photoresists

IBM13 citations78

US5866627AFeb 2, 1999

Photosensitive polyimide precursors

IBM10 citations72