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Inventor
HIRATA AKISUKE
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “HIRATA AKISUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ULVAC INC
2 patents
US7436068B2
Oct 14, 2008
Components for film forming device
ULVAC INC
2 citations
56
US7951463B2
May 31, 2011
Water collapsible aluminum film
ULVAC INC
0 citations
46
HIRATA AKISUKE
1 patent
US8216654B2
Jul 10, 2012
Components for a film-forming device and method for cleaning the same
HIRATA AKISUKE
0 citations
39