Inventor

CHAIO LI-CHIH

TW2 patents

Patents

2 patents

US6828251B2Dec 7, 2004

Method for improved plasma etching control

TAIWAN SEMICONDUCTOR MFG12 citations71

US6884728B2Apr 26, 2005

Method for removing polymeric residue contamination on semiconductor feature sidewalls

TAIWAN SEMICONDUCTOR MFG4 citations59