Inventor
KEMPER PETRUS WILHELMUS JOSEPH
NL4 patents
Patents
4 patentsUS7586108B2Sep 8, 2009
Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector
ASML NETHERLANDS BV56 citations94
US7190437B2Mar 13, 2007
Wireless signaling in a lithographic apparatus
ASML NETHERLANDS BV12 citations82
US7170583B2Jan 30, 2007
Lithographic apparatus immersion damage control
ASML NETHERLANDS BV8 citations68
US7321416B2Jan 22, 2008
Lithographic apparatus, device manufacturing method, device manufactured thereby, and controllable patterning device utilizing a spatial light modulator with distributed digital to analog conversion
ASML NETHERLANDS BV1 citations46