Inventor
KASAMATSU RIYUUSUKE
JP4 patents
Patents
4 patentsUS7884000B2Feb 8, 2011
Method for manufacturing simox wafer
SUMCO CORP7 citations82
US7410877B2Aug 12, 2008
Method for manufacturing SIMOX wafer and SIMOX wafer
SUMCO CORP5 citations61
US7550371B2Jun 23, 2009
Method of producing SIMOX wafer
SUMCO CORP0 citations50
US7485874B2Feb 3, 2009
Apparatus for manufacturing semiconductor substrates
SUMCO CORP0 citations49