Inventor
MANKIDY PRATIK
US7 patents
⚠️ This page may combine multiple inventors who share the name “MANKIDY PRATIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DE LA LLERA ANTHONY
3 patentsUS8573152B2Nov 5, 2013
Showerhead electrode
DE LA LLERA ANTHONY595 citations98
US9245716B2Jan 26, 2016
Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly
DE LA LLERA ANTHONY11 citations82
US8470127B2Jun 25, 2013
Cam-locked showerhead electrode and assembly
DE LA LLERA ANTHONY11 citations80
LAM RES CORP
3 patentsUS10262834B2Apr 16, 2019
Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly
LAM RES CORP1 citations61
US12505991B2Dec 23, 2025
Tunability of edge plasma density for tilt control
LAM RES CORP0 citations56
US12139791B2Nov 12, 2024
Showerhead faceplates with angled gas distribution passages for semiconductor processing tools
LAM RES CORP0 citations51