Inventor
TAKESHITA KAZUHIRO
JP30 patents
⚠️ This page may combine multiple inventors who share the name “TAKESHITA KAZUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
25 patentsUS6416583B1Jul 9, 2002
Film forming apparatus and film forming method
TOKYO ELECTRON LTD128 citations99
US6627263B2Sep 30, 2003
Film forming apparatus and film forming method
TOKYO ELECTRON LTD95 citations98
US6190459B1Feb 20, 2001
Gas treatment apparatus
TOKYO ELECTRON LTD104 citations98
US6676757B2Jan 13, 2004
Coating film forming apparatus and coating unit
TOKYO ELECTRON LTD60 citations96
US6383948B1May 7, 2002
Coating film forming apparatus and coating film forming method
TOKYO ELECTRON LTD57 citations96
US6248168B1Jun 19, 2001
Spin coating apparatus including aging unit and solvent replacement unit
TOKYO ELECTRON LTD63 citations95
US6872256B2Mar 29, 2005
Film forming unit
TOKYO ELECTRON LTD25 citations92
US6808567B2Oct 26, 2004
Gas treatment apparatus
TOKYO ELECTRON LTD14 citations92
US6660096B2Dec 9, 2003
Gas treatment apparatus
TOKYO ELECTRON LTD17 citations92
US6616760B2Sep 9, 2003
Film forming unit
TOKYO ELECTRON LTD28 citations92
US6605153B2Aug 12, 2003
Coating film forming apparatus
TOKYO ELECTRON LTD26 citations92
US6589339B2Jul 8, 2003
Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film
TOKYO ELECTRON LTD26 citations92
US6514344B2Feb 4, 2003
Film forming unit
TOKYO ELECTRON LTD28 citations92
US6716478B2Apr 6, 2004
Coating film forming apparatus and coating film forming method
TOKYO ELECTRON LTD17 citations84
US6860945B2Mar 1, 2005
Substrate coating unit and substrate coating method
TOKYO ELECTRON LTD12 citations83
US7087118B2Aug 8, 2006
Coating film forming apparatus and coating unit
TOKYO ELECTRON LTD6 citations73
US6936107B2Aug 30, 2005
Coating film forming apparatus and coating unit
TOKYO ELECTRON LTD11 citations73
US6726775B2Apr 27, 2004
Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film
TOKYO ELECTRON LTD6 citations73
US6197385B1Mar 6, 2001
Film forming apparatus, substrate conveying apparatus, film forming method, and substrate conveying method
TOKYO ELECTRON LTD10 citations73
US10795265B2Oct 6, 2020
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD2 citations72
US11476136B2Oct 18, 2022
Substrate processing apparatus and method of adjusting substrate processing apparatus
TOKYO ELECTRON LTD0 citations57
US7205024B2Apr 17, 2007
Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film
TOKYO ELECTRON LTD0 citations51
US10504757B2Dec 10, 2019
Substrate processing apparatus and method of adjusting substrate processing apparatus
TOKYO ELECTRON LTD0 citations47
US7998306B2Aug 16, 2011
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations41
US10877376B2Dec 29, 2020
Light irradiating device
TOKYO ELECTRON LTD0 citations36