Inventor
MIZUTANI YOJI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “MIZUTANI YOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS6190459B1Feb 20, 2001
Gas treatment apparatus
TOKYO ELECTRON LTD104 citations98
US6248168B1Jun 19, 2001
Spin coating apparatus including aging unit and solvent replacement unit
TOKYO ELECTRON LTD63 citations95
US6808567B2Oct 26, 2004
Gas treatment apparatus
TOKYO ELECTRON LTD14 citations92
US6660096B2Dec 9, 2003
Gas treatment apparatus
TOKYO ELECTRON LTD17 citations92
US6589339B2Jul 8, 2003
Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film
TOKYO ELECTRON LTD26 citations92
US6261365B1Jul 17, 2001
Heat treatment method, heat treatment apparatus and treatment system
TOKYO ELECTRON LTD19 citations92
US5704981AJan 6, 1998
Processing apparatus for substrates to be processed
TOKYO ELECTRON LTD34 citations89
US6656273B1Dec 2, 2003
Film forming method and film forming system
TOKYO ELECTRON LTD18 citations84
US6726775B2Apr 27, 2004
Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film
TOKYO ELECTRON LTD6 citations73
US6197385B1Mar 6, 2001
Film forming apparatus, substrate conveying apparatus, film forming method, and substrate conveying method
TOKYO ELECTRON LTD10 citations73
US6979474B2Dec 27, 2005
Heat treatment method, heat treatment apparatus and treatment system
TOKYO ELECTRON LTD4 citations62
US7205024B2Apr 17, 2007
Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film
TOKYO ELECTRON LTD0 citations51