Inventor

GRANNEMAN ERNST

NL3 patents

⚠️ This page may combine multiple inventors who share the name “GRANNEMAN ERNST”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM MICROCHEMISTRY OY

1 patent

US6759325B2Jul 6, 2004

Sealing porous structures

ASM MICROCHEMISTRY OY169 citations98

ASM INT

1 patent

US6820570B2Nov 23, 2004

Atomic layer deposition reactor

ASM INT647 citations96

ASM INTERNAT NV

1 patent

US6843201B2Jan 18, 2005

Temperature control for single substrate semiconductor processing reactor

ASM INTERNAT NV20 citations87