Inventor
YOKOTA YUKIHIRO
JP4 patents
Patents
4 patentsUS11521845B2Dec 6, 2022
Lamp device, exposure apparatus, and method of manufacturing article
CANON KK0 citations61
US6604011B2Aug 5, 2003
Reticle chuck in exposure apparatus and semiconductor device manufacturing method using the same
CANON KK3 citations55
US7453570B2Nov 18, 2008
Mark position measuring method and apparatus
CANON KK1 citations48
US7310146B2Dec 18, 2007
Mark position measuring method and apparatus
CANON KK1 citations48