Inventor

MIYAMATSU TAKASHI

JP2 patents

Patents

2 patents

US7371503B2May 13, 2008

Sulfonium salt compound, photoacid generator, and positive-tone radiation-sensitive resin composition

JSR CORP12 citations78

US7580111B2Aug 25, 2009

Liquid for immersion exposure and immersion exposure method

JSR CORP5 citations60