Inventor

KEIJ STEFAN CAROLUS JACOBUS AN

NL2 patents

Patents

2 patents

US7532305B2May 12, 2009

Lithographic apparatus and device manufacturing method using overlay measurement

ASML NETHERLANDS BV13 citations82

US7391513B2Jun 24, 2008

Lithographic apparatus and device manufacturing method using overlay measurement quality indication

ASML NETHERLANDS BV5 citations61