Inventor

SONG FUQUAN

GB4 patents

⚠️ This page may combine multiple inventors who share the name “SONG FUQUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HEYS PETER NICHOLAS

3 patents

US8568530B2Oct 29, 2013

Use of cyclopentadienyl type hafnium and zirconium precursors in atomic layer deposition

HEYS PETER NICHOLAS16 citations81

US8221852B2Jul 17, 2012

Methods of atomic layer deposition using titanium-based precursors

HEYS PETER NICHOLAS8 citations79

USRE45124ESep 9, 2014

Methods of atomic layer deposition using titanium-based precursors

HEYS PETER NICHOLAS0 citations47

SIGMA ALDRICH CO LLC

1 patent

US8039062B2Oct 18, 2011

Methods of atomic layer deposition using hafnium and zirconium-based precursors

SIGMA ALDRICH CO LLC21 citations88