Inventor

MIZUKAMI KIYOTAKA

JP2 patents

Patents

2 patents

US9299567B2Mar 29, 2016

Manufacturing method of MIS-type semiconductor device, including heating a zirconium oxynitride (ZrON) layer

TOYODA GOSEI KK0 citations47

US9793369B2Oct 17, 2017

MIS-type semiconductor device

TOYODA GOSEI KK1 citations45