Inventor
HAKUTA KOHZO
JP4 patents
⚠️ This page may combine multiple inventors who share the name “HAKUTA KOHZO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CENTRAL GLASS CO LTD
3 patentsUS4740982AApr 26, 1988
Method of refining rare gas halide excimer laser gas
CENTRAL GLASS CO LTD71 citations95
US5149659ASep 22, 1992
Method and apparatus for analyzing fluorine containing gases
CENTRAL GLASS CO LTD64 citations93
US5017499AMay 21, 1991
Method for analyzing fluorine containing gases
CENTRAL GLASS CO LTD32 citations92