Inventor
DOLECHEK KERT
US7 patents
Patents
7 patentsUS6830057B2Dec 14, 2004
Wafer container cleaning system
SEMITOOL INC21 citations90
US6732945B2May 11, 2004
Chemical solutions methods for processing semiconductor materials
SEMITOOL INC23 citations90
US6446644B1Sep 10, 2002
Chemical solutions system for processing semiconductor materials
SEMITOOL INC32 citations90
US6536450B1Mar 25, 2003
Fluid heating system for processing semiconductor materials
SEMITOOL INC18 citations82
US6736150B2May 18, 2004
Fluid heating system for processing semiconductor materials
SEMITOOL INC7 citations71
US7060138B2Jun 13, 2006
Methods for cleaning wafer containers
SEMITOOL INC3 citations60
US6895981B2May 24, 2005
Cross flow processor
SEMITOOL INC6 citations60