Inventor

HAN QINGYAN

US2 patents

⚠️ This page may combine multiple inventors who share the name “HAN QINGYAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AXCELIS TECH INC

1 patent

US6638875B2Oct 28, 2003

Oxygen free plasma stripping process

AXCELIS TECH INC69 citations94

EATON CORP

1 patent

US6492186B1Dec 10, 2002

Method for detecting an endpoint for an oxygen free plasma process

EATON CORP27 citations89