Inventor
DAVIS JEFFRY
US8 patents
Patents
8 patentsUS6439824B1Aug 27, 2002
Automated semiconductor immersion processing system
SEMITOOL INC20 citations92
US6572320B2Jun 3, 2003
Robot for handling workpieces in an automated processing system
SEMITOOL INC19 citations91
US6536131B2Mar 25, 2003
Wafer handling system
SEMITOOL INC26 citations91
US6830057B2Dec 14, 2004
Wafer container cleaning system
SEMITOOL INC21 citations90
US6575689B2Jun 10, 2003
Automated semiconductor immersion processing system
SEMITOOL INC12 citations73
US7067018B2Jun 27, 2006
Automated system for handling and processing wafers within a carrier
SEMITOOL INC4 citations61
US7060138B2Jun 13, 2006
Methods for cleaning wafer containers
SEMITOOL INC3 citations60
US6895981B2May 24, 2005
Cross flow processor
SEMITOOL INC6 citations60