Inventor

HARA MUTSUMI

JP3 patents

Patents

3 patents

US7314690B2Jan 1, 2008

Photomask producing method and photomask blank

HOYA CORP9 citations80

US7709161B2May 4, 2010

Photomask producing method and photomask blank

HOYA CORP4 citations59

US8048596B2Nov 1, 2011

Photomask producing method and photomask blank

HOYA CORP0 citations48