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Inventor
LIN CHIN-TSUNG
TW
2 patents
⚠️ This page may combine multiple inventors who share the name “LIN CHIN-TSUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
1 patent
US8933630B2
Jan 13, 2015
Arc chamber with multiple cathodes for an ion source
TAIWAN SEMICONDUCTOR MFG
1 citations
45
TAIWAN SEMICONDUCTOR MFG CO LTD
1 patent
US9620326B2
Apr 11, 2017
Arc chamber with multiple cathodes for an ion source
TAIWAN SEMICONDUCTOR MFG CO LTD
0 citations
43