P

Inventor

UEDA AKIHIRO

JP51 patents
⚠️ This page may combine multiple inventors who share the name “UEDA AKIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

9 patents
US11567419B2Jan 31, 2023

Control method of movable body, exposure method, device manufacturing method, movable body apparatus, and exposure apparatus

NIKON CORP3 citations84
US10372046B2Aug 6, 2019

Measurement device and measurement method, exposure apparatus and exposure method, and device manufacturing method

NIKON CORP5 citations84
US10036968B2Jul 31, 2018

Control method of movable body, exposure method, device manufacturing method, movable body apparatus, and exposure apparatus

NIKON CORP3 citations84
US11003100B2May 11, 2021

Control method of movable body, exposure method, device manufacturing method, movable body apparatus, and exposure apparatus

NIKON CORP2 citations73
US10365568B2Jul 30, 2019

Control method of movable body, exposure method, device manufacturing method, movable body apparatus, and exposure apparatus

NIKON CORP3 citations73
US12164236B2Dec 10, 2024

Measurement device and measurement method, exposure apparatus and exposure method, and device manufacturing method

NIKON CORP0 citations62
US11994811B2May 28, 2024

Control method of movable body, exposure method, device manufacturing method, movable body apparatus, and exposure apparatus

NIKON CORP0 citations62
US10642169B2May 5, 2020

Measurement device and measurement method, exposure apparatus and exposure method, and device manufacturing method

NIKON CORP0 citations52
US10520839B2Dec 31, 2019

Control method of movable body, exposure method, device manufacturing method, movable body apparatus, and exposure apparatus

NIKON CORP0 citations52

UEDA AKIHIRO

8 patents

PROCTER & GAMBLE

7 patents

TOYOTA MOTOR CO LTD

5 patents

IHI CORP

5 patents

FUJITSU LTD

4 patents

FREESCALE SEMICONDUCTOR INC

2 patents

TOSHIBA LIGHTING & TECHNOLOGY

2 patents

SANDISK TECHNOLOGIES LLC

1 patent

ONOME HIROHISA

1 patent

SHONO SHOICHI

1 patent

DENSO CORP

1 patent

TOSHIBA KK

1 patent

AISIN CORP

1 patent

NEC CORP

1 patent

MOTOZONO YOSHIKAZU

1 patent

Showing the top 50 of 51 patents by PatentIndex Score.