Inventor

JARIWALA BHAVIN

US3 patents

Patents

3 patents

US10566194B2Feb 18, 2020

Selective deposition of etch-stop layer for enhanced patterning

LAM RES CORP5 citations82

US11094542B2Aug 17, 2021

Selective deposition of etch-stop layer for enhanced patterning

LAM RES CORP2 citations71

US11869770B2Jan 9, 2024

Selective deposition of etch-stop layer for enhanced patterning

LAM RES CORP0 citations60