Inventor

AITA KAZUO

JP22 patents

⚠️ This page may combine multiple inventors who share the name “AITA KAZUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AITA KAZUO

SEIKO INSTR INC

Focused ion beam forming method

Focused ion beam processing apparatus

Method for correcting a patterned film using an ion beam

Black defect correction method and black defect correction device for photomask

Observing/forming method with focused ion beam and apparatus therefor

Ion beam machining method and device thereof

Focused ion beam apparatus

Photomask correction device

HITACHI HIGH TECH SCIENCE CORP

Method for fabricating emitter

Repair apparatus

Method for fabricating emitter

Method for acquiring image and ion beam apparatus

Method for acquiring image and ion beam apparatus

HITACHI HIGH-TECH SCIENCE CORP

Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus

Focused ion beam apparatus

Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus

MITSUBISHI ELECTRIC CORP

Method and apparatus for determining the shape of wire or like article

Image sensor having uniform sensitivity

SII NANOTECHNOLOGY INC

Method for extracting objective image

Ion beam processing method

KAITO TAKASHI

Composite focused ion beam device, process observation method using the same, and processing method

Composite focused ion beam device, and processing observation method and processing method using the same