Inventor

SOUDA YASUNARI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “SOUDA YASUNARI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANTEST CORP

2 patents

US7067830B2Jun 27, 2006

Multi-electron beam exposure method and apparatus

ADVANTEST CORP13 citations83

US7126140B2Oct 24, 2006

Multi-electron beam exposure method and apparatus

ADVANTEST CORP7 citations73

HITACHI HIGH TECH CORP

2 patents

US7786437B2Aug 31, 2010

Pattern inspection method and pattern inspection system

HITACHI HIGH TECH CORP7 citations73

US8026482B2Sep 27, 2011

Charged particle beam apparatus and control method therefor

HITACHI HIGH TECH CORP0 citations40

TOYODA YASUTAKA

1 patent

US8217351B2Jul 10, 2012

Pattern inspection method and pattern inspection system

TOYODA YASUTAKA6 citations82