Inventor
TOMIYOSHI RIKIO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “TOMIYOSHI RIKIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
5 patentsUS7218985B2May 15, 2007
Semiconductor manufacturing apparatus
HITACHI HIGH TECH CORP5 citations73
US7099733B2Aug 29, 2006
Semiconductor production system
HITACHI HIGH TECH CORP3 citations62
US7027888B2Apr 11, 2006
Semiconductor manufacturing apparatus
HITACHI HIGH TECH CORP2 citations62
US6941186B2Sep 6, 2005
Semiconductor manufacturing apparatus
HITACHI HIGH TECH CORP4 citations62
US7177718B2Feb 13, 2007
Semiconductor production system
HITACHI HIGH TECH CORP0 citations51
HITACHI LTD
4 patentsUS6850854B2Feb 1, 2005
Semiconductor production system
HITACHI LTD294 citations98
US6591207B2Jul 8, 2003
Semiconductor production system
HITACHI LTD217 citations98
US5384466AJan 24, 1995
Electron beam lithography apparatus and a method thereof
HITACHI LTD7 citations72
US7526352B2Apr 28, 2009
Semiconductor production system
HITACHI LTD0 citations52