Inventor
MORIYAMA SHIGEO
JP47 patents
⚠️ This page may combine multiple inventors who share the name “MORIYAMA SHIGEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
43 patentsUS6077027AJun 20, 2000
Semiconductor manufacturing apparatus for transferring articles with a bearing-less joint and method for manufacturing semiconductor device
HITACHI LTD418 citations99
US5609511AMar 11, 1997
Polishing method
HITACHI LTD413 citations99
US6850854B2Feb 1, 2005
Semiconductor production system
HITACHI LTD294 citations98
US6591207B2Jul 8, 2003
Semiconductor production system
HITACHI LTD217 citations98
US5981399ANov 9, 1999
Method and apparatus for fabricating semiconductor devices
HITACHI LTD114 citations97
US5222112AJun 22, 1993
X-ray pattern masking by a reflective reduction projection optical system
HITACHI LTD134 citations97
US6099393AAug 8, 2000
Polishing method for semiconductors and apparatus therefor
HITACHI LTD77 citations96
US6043155AMar 28, 2000
Polishing agent and polishing method
HITACHI LTD56 citations96
US5772780AJun 30, 1998
Polishing agent and polishing method
HITACHI LTD68 citations96
US5025268AJun 18, 1991
Optical scanning apparatus and asymmetrical aspheric scanning lens
HITACHI LTD65 citations96
US4575942AMar 18, 1986
Ultra-precision two-dimensional moving apparatus
HITACHI LTD126 citations96
US4409860AOct 18, 1983
Apparatus for precisely moving a table
HITACHI LTD146 citations96
US4358198ANov 9, 1982
Apparatus for moving table on stage
HITACHI LTD58 citations96
US4012843AMar 22, 1977
Concave diffraction grating and a manufacturing method thereof
HITACHI LTD68 citations96
US5628828AMay 13, 1997
Processing method and equipment for processing a semiconductor device having holder/carrier with flattened surface
HITACHI LTD82 citations95
US4057347ANov 8, 1977
Optical exposure apparatus
HITACHI LTD56 citations95
US4798470AJan 17, 1989
Pattern printing method and apparatus
HITACHI LTD37 citations93
US6723144B2Apr 20, 2004
Semiconductor device fabricating method
HITACHI LTD38 citations92
US5658115AAug 19, 1997
Transfer apparatus
HITACHI LTD22 citations92
US5411430AMay 2, 1995
Scanning optical device and method for making a hybrid scanning lens used therefor
HITACHI LTD31 citations92
US5408320AApr 18, 1995
Workpiece having alignment marks for positioning a pattern at a different pitch to be formed thereon, and method for fabricating the same
HITACHI LTD29 citations92
US5305364AApr 19, 1994
Projection type X-ray lithography apparatus
HITACHI LTD38 citations92
US5272744ADec 21, 1993
Reflection mask
HITACHI LTD33 citations92
US6180020B1Jan 30, 2001
Polishing method and apparatus
HITACHI LTD46 citations91
US5563465AOct 8, 1996
Actuator
HITACHI LTD45 citations88
US6336842B1Jan 8, 2002
Rotary machining apparatus
HITACHI LTD30 citations86
US6524961B1Feb 25, 2003
Semiconductor device fabricating method
HITACHI LTD14 citations84
US6478977B1Nov 12, 2002
Polishing method and apparatus
HITACHI LTD15 citations83
US5971701AOct 26, 1999
Semiconductor manufacturing apparatus for transferring articles with a bearing-less joint and method for manufacturing semiconductor device
HITACHI LTD15 citations82
US4219933ASep 2, 1980
Diffraction grating ruling engine
HITACHI LTD21 citations82
US6221773B1Apr 24, 2001
Method for working semiconductor wafer
HITACHI LTD12 citations74
US5107628AApr 28, 1992
Method of fabricating article having aspheric figure and tool for use in carrying out the method
HITACHI LTD17 citations74
US4739161AApr 19, 1988
Fine displacement transducer employing plural optical fibers
HITACHI LTD14 citations74
US4282469AAug 4, 1981
Positioning control system
HITACHI LTD15 citations74
US4153341AMay 8, 1979
Automatic focusing apparatus
HITACHI LTD12 citations74
US6612912B2Sep 2, 2003
Method for fabricating semiconductor device and processing apparatus for processing semiconductor device
HITACHI LTD8 citations73
US5200798AApr 6, 1993
Method of position detection and the method and apparatus of printing patterns by use of the position detection method
HITACHI LTD14 citations73
US6676496B2Jan 13, 2004
Apparatus for processing semiconductor wafers
HITACHI LTD2 citations63
US4045141AAug 30, 1977
Photoelectric microscope
HITACHI LTD5 citations63
US4984259AJan 8, 1991
X-ray exposure apparatus
HITACHI LTD2 citations62
US7526352B2Apr 28, 2009
Semiconductor production system
HITACHI LTD0 citations52
US7166013B2Jan 23, 2007
Polishing apparatus and method for producing semiconductors using the apparatus
HITACHI LTD1 citations48
US7137866B2Nov 21, 2006
Polishing apparatus and method for producing semiconductors using the apparatus
HITACHI LTD0 citations38
TOYODA CHUO KENKYUSHO KK
3 patentsUS4522660AJun 11, 1985
Process for ion nitriding of aluminum or an aluminum alloy and apparatus therefor
TOYODA CHUO KENKYUSHO KK21 citations82
US4818351AApr 4, 1989
Method for the surface treatment of an iron or iron alloy article
TOYODA CHUO KENKYUSHO KK7 citations74
US4804445AFeb 14, 1989
Method for the surface treatment of an iron or iron alloy article
TOYODA CHUO KENKYUSHO KK3 citations63