Inventor
BARMAN ARKAJIT ROY
US4 patents
Patents
4 patentsUS10629430B2Apr 21, 2020
Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications
APPLIED MATERIALS INC4 citations70
US9960035B2May 1, 2018
Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications
APPLIED MATERIALS INC2 citations70
US9548200B2Jan 17, 2017
Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications
APPLIED MATERIALS INC3 citations70
US11600468B2Mar 7, 2023
Multi channel splitter spool
APPLIED MATERIALS INC0 citations58