Inventor
FUKUMOTO YASUHIRO
JP28 patents
⚠️ This page may combine multiple inventors who share the name “FUKUMOTO YASUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
12 patentsUS11107698B2Aug 31, 2021
Substrate treating method
SCREEN HOLDINGS CO LTD2 citations71
US10915025B2Feb 9, 2021
Substrate treating method
SCREEN HOLDINGS CO LTD1 citations61
US10941492B2Mar 9, 2021
Substrate treating method
SCREEN HOLDINGS CO LTD0 citations60
US11143964B2Oct 12, 2021
Substrate treating method and apparatus used therefor
SCREEN HOLDINGS CO LTD0 citations50
US10955745B2Mar 23, 2021
Exposure device, substrate processing apparatus, exposure method and substrate processing method
SCREEN HOLDINGS CO LTD0 citations50
US10900126B2Jan 26, 2021
Substrate treating method and apparatus used therefor
SCREEN HOLDINGS CO LTD0 citations50
US11387121B2Jul 12, 2022
Substrate treating apparatus and substrate treating system including pin lift mechanism below cooling base and heat plate
SCREEN HOLDINGS CO LTD0 citations46
US10651062B2May 12, 2020
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations40
US10629463B2Apr 21, 2020
Thermal processing apparatus and thermal processing method
SCREEN HOLDINGS CO LTD0 citations38
US10444636B2Oct 15, 2019
Exposure device substrate processing apparatus, exposure method of substrate and substrate processing method
SCREEN HOLDINGS CO LTD0 citations38
US10401736B2Sep 3, 2019
Exposure device, substrate processing apparatus, exposure method of substrate and substrate processing method
SCREEN HOLDINGS CO LTD0 citations38
US10214814B2Feb 26, 2019
Substrate treating apparatus and treatment gas supplying nozzle
SCREEN HOLDINGS CO LTD0 citations38
JEOL LTD
3 patentsFUKUMOTO YASUHIRO
3 patentsUS8801883B2Aug 12, 2014
Method for producing fixing-unit member and fixing-unit member
FUKUMOTO YASUHIRO1 citations46
US9201333B2Dec 1, 2015
Heat-shrinkable resin tube and rotary member for image forming apparatus
FUKUMOTO YASUHIRO0 citations35
US8828514B2Sep 9, 2014
Fluororesin tube and rotary member for fixing device
FUKUMOTO YASUHIRO0 citations35
SUMITOMO ELECTRIC INDUSTRIES
2 patentsDAINIPPON SCREEN MFG
2 patentsUS7927096B2Apr 19, 2011
Substrate support structure, heat treatment apparatus using same, first sheet-like object for use in the substrate support structure, method of manufacturing the substrate support structure, heat treatment apparatus, and substrate sucking method
DAINIPPON SCREEN MFG15 citations84
US7139638B2Nov 21, 2006
Substrate processing unit, method for detecting the position of a substrate and substrate processing apparatus
DAINIPPON SCREEN MFG16 citations82