Inventor

HUDSON ERIC

US69 patents

⚠️ This page may combine multiple inventors who share the name “HUDSON ERIC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HUDSON ERIC

LAM RES CORP

Electronic knob for tuning radial etch non-uniformity at VHF frequencies

Three or more states for achieving high aspect ratio dielectric etch

Hybrid RF capacitively and inductively coupled plasma source using multifrequency RF powers and methods of use thereof

Stabilized photoresist structure for etching process

Method for etching features in dielectric layers

Methods for measuring a set of electrical characteristics in a plasma

Plasma processing chamber with an apparatus for measuring a set of electrical characteristics in a plasma

Adjustable height PIF probe

Method and apparatus for detecting endpoint during plasma etching of thin films

Etching features using metal passivation

Wafer electrical discharge control using argon free dechucking gas

Method and apparatus to detect fault conditions of plasma processing reactor

Apparatuses, systems and methods for rapid cleaning of plasma confinement rings with minimal erosion of other chamber parts

Methods and apparatus for determining the endpoint of a cleaning or conditioning process in a plasma processing system

Post-development treatment of patterned photoresist to promote cross-linking of polymer chains

Method for etching features in a stack

Multi zone gas injection upper electrode system

Apparatus for measuring a set of electrical characteristics in a plasma

Pulsed plasma chamber in dual chamber configuration

Pulsed plasma chamber in dual chamber configuration

Self-assembled monolayers as an etchant in atomic layer etching

Three or more states for achieving high aspect ratio dielectric etch

Multi-state pulsing for achieving a balance between bow control and mask selectivity

Porous low-k dielectric etch

Negative ion control for dielectric etch

Adjustable height PIF probe

Methods and apparatus for igniting a low pressure plasma

Process control for ion energy delivery using multiple generators and phase control

Systems and methods for cleaning an edge ring pocket

Apparatus for the deposition of a conformal film on a substrate and methods therefor

HUDSON ERIC

Plasma confinement structures in plasma processing systems

Detection of arcing events in wafer plasma processing through monitoring of trace gas concentrations

Multi-section fishing device

User interface system and method for diagnosing a rotating machine condition not based upon prior measurement history

Apparatuses, systems and methods for rapid cleaning of plasma confinement rings with minimal erosion of other chamber parts

Plasma confinement structures in plasma processing systems and methods thereof

Multi-section fishing device

DHINDSA RAJINDER

Triode reactor design with multiple radiofrequency powers

Method and apparatus for inducing DC voltage on wafer-facing electrode

Method and apparatus for DC voltage control on RF-powered electrode

FISCHER ANDREAS

Controlling ion energy distribution in plasma processing systems

Methods and apparatus for dual confinement and ultra-high pressure in an adjustable gap plasma chamber

MARAKHTANOV ALEXEI

Methods and apparatus for a hybrid capacitively-coupled and an inductively-coupled plasma processing system

Hybrid RF capacitively and inductively coupled plasma source using multifrequency RF powers and methods of use thereof

FLUKE CORP

User interface system and method for diagnosing a rotating machine condition not based upon prior measurement history

RECYCLINE INC

Cutlery dispenser

KEIL DOUGLAS

Apparatus and method for controlling plasma potential

BISE RYAN

Multi zone gas injection upper electrode system

CHEN ZHIGANG

Electronic knob for tuning radial etch non-uniformity at VHF frequencies

MARAKHATANOV ALEXEI

Negative ion control for dielectric etch