Inventor
SHAO SHOUQIAN
US18 patents
⚠️ This page may combine multiple inventors who share the name “SHAO SHOUQIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS10697062B2Jun 30, 2020
Gas flow guide design for uniform flow distribution and efficient purge
APPLIED MATERIALS INC3 citations71
US12394595B2Aug 19, 2025
Multi-antenna unit for large area inductively coupled plasma processing apparatus
APPLIED MATERIALS INC0 citations62
US12080516B2Sep 3, 2024
High density plasma enhanced process chamber
APPLIED MATERIALS INC0 citations62
US11929236B2Mar 12, 2024
Methods of tuning to improve plasma stability
APPLIED MATERIALS INC0 citations62
US11967516B2Apr 23, 2024
Substrate support for chucking of mask for deposition processes
APPLIED MATERIALS INC0 citations59
INTERMOLECULAR INC
3 patentsUS8821985B2Sep 2, 2014
Method and apparatus for high-K gate performance improvement and combinatorial processing
INTERMOLECULAR INC342 citations98
US9330928B2May 3, 2016
Methods for selective etching of a multi-layer substrate
INTERMOLECULAR INC2 citations60
US9023438B2May 5, 2015
Methods and apparatus for combinatorial PECVD or PEALD
INTERMOLECULAR INC0 citations41
SHAO SHOUQIAN
3 patentsUS8974649B2Mar 10, 2015
Combinatorial RF bias method for PVD
SHAO SHOUQIAN3 citations59
US8925481B2Jan 6, 2015
Systems and methods for measuring, monitoring and controlling ozone concentration
SHAO SHOUQIAN1 citations48
US8851010B2Oct 7, 2014
Systems and methods for measuring, monitoring and controlling ozone concentration
SHAO SHOUQIAN0 citations48