Inventor
YOO KWANG-JAI
KR2 patents
Patents
2 patentsUS6567964B2May 20, 2003
Continuously variable dummy pattern density generating systems, methods and computer program products for patterning integrated circuits
SAMSUNG ELECTRONICS CO LTD79 citations95
US6484300B1Nov 19, 2002
Systems, methods and computer program products for obtaining an effective pattern density of a layer in an integrated circuit, and for simulating a chemical-mechanical polishing process using the same
SAMSUNG ELECTRONICS CO LTD84 citations92