Inventor

FYEN WIM

BE2 patents

⚠️ This page may combine multiple inventors who share the name “FYEN WIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IMEC INTER UNI MICRO ELECTR

1 patent

US7224433B2May 29, 2007

Method and apparatus for immersion lithography

IMEC INTER UNI MICRO ELECTR4 citations56

IMEC

1 patent

US7867565B2Jan 11, 2011

Method for coating substrates

IMEC0 citations40