Inventor
HOECHST ARNIM
DE16 patents
⚠️ This page may combine multiple inventors who share the name “HOECHST ARNIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BOSCH GMBH ROBERT
6 patentsUS7495302B2Feb 24, 2009
Micromechanical component having a diaphragm
BOSCH GMBH ROBERT8 citations83
US7243551B2Jul 17, 2007
Micromechanical component having a sealed cavity and at least two dielectric layers and corresponding method for its manufacture
BOSCH GMBH ROBERT7 citations73
US7435991B2Oct 14, 2008
Micromechanical sensor
BOSCH GMBH ROBERT2 citations58
US9725300B2Aug 8, 2017
Capacitive MEMS-sensor element having bond pads for the electrical contacting of the measuring capacitor electrodes
BOSCH GMBH ROBERT1 citations51
US11012789B2May 18, 2021
MEMS microphone system
BOSCH GMBH ROBERT0 citations50
US10793430B2Oct 6, 2020
Method for producing thin MEMS wafers
BOSCH GMBH ROBERT0 citations40