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Inventor
LEE GUEN-SUK
KR
4 patents
⚠️ This page may combine multiple inventors who share the name “LEE GUEN-SUK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
2 patents
US10134567B2
Nov 20, 2018
Microwave plasma processing apparatus
SAMSUNG ELECTRONICS CO LTD
0 citations
47
US8343309B2
Jan 1, 2013
Substrate processing apparatus
SAMSUNG ELECTRONICS CO LTD
1 citations
42
CHOI JIN HYUK
1 patent
US8980047B2
Mar 17, 2015
Microwave plasma processing apparatus
CHOI JIN HYUK
0 citations
45
JEON SANG-JEAN
1 patent
US8404080B2
Mar 26, 2013
Apparatus to treat a substrate
JEON SANG-JEAN
1 citations
42