Inventor

MARAKHATNOV ALEXEI

US2 patents

Patents

2 patents

US8869742B2Oct 28, 2014

Plasma processing chamber with dual axial gas injection and exhaust

DHINDSA RAJINDER195 citations97

US9184028B2Nov 10, 2015

Dual plasma volume processing apparatus for neutral/ion flux control

DHINDSA RAJINDER34 citations92