Inventor
LIUCCI FRANK V
US3 patents
Patents
3 patentsUS6077786AJun 20, 2000
Methods and apparatus for filling high aspect ratio structures with silicate glass
IBM57 citations95
US6159870ADec 12, 2000
Borophosphosilicate glass incorporated with fluorine for low thermal budget gap fill
IBM16 citations83
US6339022B1Jan 15, 2002
Method of annealing copper metallurgy
IBM6 citations59