Inventor
OOWADA FUKUO
JP2 patents
Patents
2 patentsUS7011999B2Mar 14, 2006
Method of manufacturing an integrated circuit device including forming an oxidation resistant film over an isolation region and subsequently forming a gate insulating film of a misfet
RENESAS TECH CORP33 citations88
US7611942B2Nov 3, 2009
Semiconductor integrated circuit device and a method of manufacturing the same
RENESAS TECH CORP10 citations79