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Inventor
KOMIYA ATSUKI
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “KOMIYA ATSUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAKECHI HIROAKI
1 patent
US8600543B2
Dec 3, 2013
Apparatus and method for controlling temperature of semiconductor wafers
TAKECHI HIROAKI
9 citations
78
MARUYAMA SHIGENAO
1 patent
US8511261B2
Aug 20, 2013
Piston cooling device
MARUYAMA SHIGENAO
6 citations
58
KEIHIN CORP
1 patent
US10791650B2
Sep 29, 2020
Cooling device
KEIHIN CORP
1 citations
51