Inventor

RACHERLA SRIKANTH V

US2 patents

Patents

2 patents

US9214340B2Dec 15, 2015

Apparatus and method of forming an indium gallium zinc oxide layer

APPLIED MATERIALS INC313 citations96

US10655222B2May 19, 2020

Thin film encapsulation processing system and process kit

APPLIED MATERIALS INC0 citations46