Inventor

ROVIRA PABLO

US4 patents

⚠️ This page may combine multiple inventors who share the name “ROVIRA PABLO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

3 patents

US10139352B2Nov 27, 2018

Measurement of small box size targets

KLA TENCOR CORP3 citations71

US10663392B2May 26, 2020

Variable aperture mask

KLA TENCOR CORP1 citations60

US11562289B2Jan 24, 2023

Loosely-coupled inspection and metrology system for high-volume production process monitoring

KLA TENCOR CORP0 citations50

KLA CORP

1 patent

US11268901B2Mar 8, 2022

Variable aperture mask

KLA CORP0 citations60